The influence of target structure on topographical features produced by ion beam sputtering
- 1 May 1981
- journal article
- Published by Elsevier in Nuclear Instruments and Methods
- Vol. 182-183, 287-290
- https://doi.org/10.1016/0029-554x(81)90701-1
Abstract
No abstract availableKeywords
This publication has 2 references indexed in Scilit:
- The crystallographic dependence of surface topographical features formed by energetic ion bombardment of copperNuclear Instruments and Methods, 1980
- Sputtering—Surface changes induced by ion bombardmentProgress in Surface Science, 1976