Recent improvements in monomolecular resists
- 1 May 1980
- journal article
- Published by Elsevier in Thin Solid Films
- Vol. 68 (1), 99-100
- https://doi.org/10.1016/0040-6090(80)90140-6
Abstract
No abstract availableThis publication has 2 references indexed in Scilit:
- Polymerized monomolecular layers: A new class of ultrathin resins for microlithographyThin Solid Films, 1980
- Solid-state electron-induced polymerization of ω-tricosenoic acid multilayersJournal of Colloid and Interface Science, 1977