Lightly-doped polysilicon bridge as a flow meter
- 1 September 1988
- journal article
- Published by Elsevier in Sensors and Actuators
- Vol. 15 (1), 63-75
- https://doi.org/10.1016/0250-6874(88)85018-2
Abstract
No abstract availableKeywords
This publication has 7 references indexed in Scilit:
- A monolithic gas flow sensor with polyimide as thermal insulatorIEEE Transactions on Electron Devices, 1986
- A model for conduction in polycrystalline silicon—Part II: Comparison of theory and experimentIEEE Transactions on Electron Devices, 1981
- Modeling and optimization of monolithic polycrystalline silicon resistorsIEEE Transactions on Electron Devices, 1981
- Phosphorus Doping of Low Pressure Chemically Vapor‐Deposited Silicon FilmsJournal of the Electrochemical Society, 1979
- Transport properties of polycrystalline silicon filmsJournal of Applied Physics, 1978
- Conduction properties of lightly doped, polycrystalline siliconSolid-State Electronics, 1978
- Hall Mobility in Chemically Deposited Polycrystalline SiliconJournal of Applied Physics, 1971