Long minority carrier lifetimes in 6H SiC grown by chemical vapor deposition

Abstract
The room‐temperature minority carrier lifetimes have been measured on 6H SiC epitaxial layers with residual n‐type doping ranging from below 1014 cm−3 to above 1017 cm−3. Lifetimes as high as 0.45 μs have been achieved for thick low‐doped material. The samples were grown by chemical vapor deposition using silane and propane or silane and methane in a hydrogen ambient. The minority carrier lifetimes were measured by monitoring the decay of the near‐band gap room‐temperature luminescence of the samples after excitation of a short laser pulse.