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Effect of ion bombardment during deposition on magnetic film properties
Home
Publications
Effect of ion bombardment during deposition on magnetic film properties
Effect of ion bombardment during deposition on magnetic film properties
LH
L. F. Herte
L. F. Herte
AL
A. Lang
A. Lang
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1 March 1981
journal article
Published by
American Vacuum Society
in
Journal of Vacuum Science and Technology
Vol. 18
(2)
,
153-155
https://doi.org/10.1116/1.570713
Abstract
No abstract available
Keywords
ION BOMBARDMENT
DEPOSITION ON MAGNETIC
MAGNETIC FILM PROPERTIES
BOMBARDMENT DURING DEPOSITION
Cited by 14 articles