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Induced interface interactions in Ti/Si systems by ion implantation
Home
Publications
Induced interface interactions in Ti/Si systems by ion implantation
Induced interface interactions in Ti/Si systems by ion implantation
KW
K. L. Wang
K. L. Wang
FB
F. Bacon
F. Bacon
RR
R. F. Reihl
R. F. Reihl
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1 March 1979
journal article
Published by
American Vacuum Society
in
Journal of Vacuum Science and Technology
Vol. 16
(2)
,
130-133
https://doi.org/10.1116/1.569885
Abstract
No abstract available
Keywords
ION IMPLANTATION
TI/SI SYSTEMS
INDUCED INTERFACE INTERACTIONS
Cited by 18 articles