Conical topography formed on ion-etched crystalline surfaces
- 1 November 1975
- journal article
- Published by AIP Publishing in Journal of Applied Physics
- Vol. 46 (11), 5053-5054
- https://doi.org/10.1063/1.321500
Abstract
An equation based on ion channeling in a crystal is shown to predict the apex angle of cones formed on surfaces eroded by ions in the energy range 1–30 keV for 37 ion-target-energy combinations.Keywords
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