Temperature-independent pressure sensors using polycrystalline silicon strain gauges
- 17 May 1989
- journal article
- Published by Elsevier in Sensors and Actuators
- Vol. 17 (3-4), 521-527
- https://doi.org/10.1016/0250-6874(89)80040-x
Abstract
No abstract availableThis publication has 3 references indexed in Scilit:
- Polycrystalline silicon-based sensorsSensors and Actuators, 1986
- The Effect of Film Thickness on the Electrical Properties of LPCVD Polysilicon FilmsJournal of the Electrochemical Society, 1984
- The electrical properties of polycrystalline silicon filmsJournal of Applied Physics, 1975