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Interactions in metallization systems for integrated circuits
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Publications
Interactions in metallization systems for integrated circuits
Interactions in metallization systems for integrated circuits
SM
S. P. Murarka
S. P. Murarka
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1 October 1984
journal article
Published by
American Vacuum Society
in
Journal of Vacuum Science & Technology B
Vol. 2
(4)
,
693-706
https://doi.org/10.1116/1.582864
Abstract
No abstract available
Cited by 44 articles