Reactive Deposition of Cubic Silicon Carbide
- 1 January 1969
- journal article
- research article
- Published by AIP Publishing in Journal of Applied Physics
- Vol. 40 (1), 430
- https://doi.org/10.1063/1.1657082
Abstract
No abstract availableKeywords
This publication has 1 reference indexed in Scilit:
- THE GROWTH OF SINGLE-CRYSTAL FILMS OF CUBIC SILICON CARBIDE ON SILICONApplied Physics Letters, 1967