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Summary Abstract: Growth of high quality epitaxial GaAs films by sputter deposition
Home
Publications
Summary Abstract: Growth of high quality epitaxial GaAs films by sputter deposition
Summary Abstract: Growth of high quality epitaxial GaAs films by sputter deposition
SB
S. A. Barnett
S. A. Barnett
GB
G. Bajor
G. Bajor
JG
J. E. Greene
J. E. Greene
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1 April 1981
journal article
Published by
American Vacuum Society
in
Journal of Vacuum Science and Technology
Vol. 18
(3)
,
906-907
https://doi.org/10.1116/1.570991
Abstract
No abstract available
Cited by 1 article