Preparation and Properties of CVD Oxides with Low Charge Levels from SiH4 ‐ CO 2 ‐ HCl ‐ H 2 System
- 1 February 1976
- journal article
- Published by The Electrochemical Society in Journal of the Electrochemical Society
- Vol. 123 (2), 238-246
- https://doi.org/10.1149/1.2132794