Miniaturized, focusing fan-out elements: design, fabrication and characterization
Open Access
- 1 January 1999
- journal article
- Published by IOP Publishing in Journal of Optics A: Pure and Applied Optics
- Vol. 1 (2), 244-248
- https://doi.org/10.1088/1464-4258/1/2/025
Abstract
We present miniaturized, focusing fan-out elements. The new micro-optical elements were fabricated using different technologies: double-sided injection moulding in polycarbonate, double-sided photolithography with subsequent transfer in quartz and direct laser writing in photoresist. The fan-out elements were characterized by measuring their efficiency and uniformity, the surface profiles of the microlenses were measured with a Twyman-Green interferometer. The overall performance of the combined, hybrid elements is demonstrated with intensity distributions recorded in the focal planes.Keywords
This publication has 3 references indexed in Scilit:
- Design, fabrication and testing of microlens arrays for sensors and microsystemsPure and Applied Optics: Journal of the European Optical Society Part A, 1997
- A microlens-array-based optical neural network applicationPure and Applied Optics: Journal of the European Optical Society Part A, 1997
- Large fanout optical interconnects using thick holographic gratings and substrate wave propagationApplied Optics, 1992