Characterization of a novel micromachined optical vibrating rate gyroscope

Abstract

The present article presents experimental results measured on a new class of micromachined rate-gyroscope, incorporating integrated optical sensing. A hybrid cantilever type device was fabricated by bulk micromachining, bonded to a complementary metal-oxide-semiconductor chip and encapsulated in a vacuum package. The proof mass is electrostatically actuated and the mechanical output motion is sensed by modulated integrative differential optical sensing method. Characterization of the device, including measurements of the natural frequencies and angular rate, is reported. Noise measurements indicate noise equivalent rate of 10 −2 –10 −3 deg/s/ √ Hz. Currently the measured minimum detectable rate is 1 deg/s due to experimental setup limitations.