Soft X-ray dosimetry and its application on the lithography beamline at SSRL
- 1 April 1988
- journal article
- Published by Elsevier in Nuclear Instruments and Methods in Physics Research Section A: Accelerators, Spectrometers, Detectors and Associated Equipment
- Vol. 266 (1-3), 612-618
- https://doi.org/10.1016/0168-9002(88)90454-8
Abstract
No abstract availableThis publication has 2 references indexed in Scilit:
- Photoelectric quantum efficiencies and filter window absorption coefficients from 20 eV to 10 KeVJournal of Applied Physics, 1981
- Determination of Kilovolt Electron Energy Dissipation vs Penetration Distance in Solid MaterialsJournal of Applied Physics, 1971