Noncrystalline films with the chemistry, bonding, and properties of diamond

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1 September 1993

journal article
Published by American Vacuum Society in Journal of Vacuum Science & Technology B: Microelectronics and Nanometer Structures

Vol. 11 (5), 1936-1941
https://doi.org/10.1116/1.586525

Abstract

No abstract available

Keywords

Cited by 40 articles