Thermodynamic and Kinetic Aspects of Heterogeneous Reactions in a Nonisothermal Low Pressure Plasma
- 1 March 1974
- journal article
- Published by Institute of Electrical and Electronics Engineers (IEEE) in IEEE Transactions on Plasma Science
- Vol. 2 (1), 25-33
- https://doi.org/10.1109/tps.1974.4316801
Abstract
Because of its high energy content and a relatively low translational temperature, the plasma of an intense low pressure discharge in a molecular gas is suitable for deposition of thin films and growth of crystals. A simple theoretical approach for estimation of chemical equilibrium composition in such systems has been developed. This approach is useful for planning of experiments, and it opens a way for further, more rigorous theoretical investigations.Keywords
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