Harmonic electrostatic motors
- 15 November 1989
- journal article
- Published by Elsevier in Sensors and Actuators
- Vol. 20 (1-2), 17-24
- https://doi.org/10.1016/0250-6874(89)87097-0
Abstract
No abstract availableKeywords
This publication has 5 references indexed in Scilit:
- The modeling of electrostatic forces in small electrostatic actuatorsPublished by Institute of Electrical and Electronics Engineers (IEEE) ,2003
- Microrobots and micromechanical systemsSensors and Actuators, 1989
- CapacitorsScientific American, 1988
- The fabrication of an electrostatic linear actuator by silicon micromachiningIEEE Transactions on Electron Devices, 1988
- Design considerations for a practical electrostatic micro-motorSensors and Actuators, 1987