Micromachined silicon cantilevers and tips for scanning probe microscopy
- 31 October 1991
- journal article
- Published by Elsevier in Microelectronic Engineering
- Vol. 15 (1-4), 407-410
- https://doi.org/10.1016/0167-9317(91)90252-9
Abstract
No abstract availableKeywords
This publication has 2 references indexed in Scilit:
- Scanning probe microscopy: Current status and future trendsJournal of Vacuum Science & Technology A, 1990
- Nanometer scale structure fabrication with the scanning tunneling microscopeApplied Physics Letters, 1987