Helicon ion source for plasma processing
- 1 April 1994
- journal article
- Published by AIP Publishing in Review of Scientific Instruments
- Vol. 65 (4), 1368-1370
- https://doi.org/10.1063/1.1144963
Abstract
No abstract availableKeywords
This publication has 3 references indexed in Scilit:
- Plasma ionization by helicon wavesPlasma Physics and Controlled Fusion, 1991
- The application of the helicon source to plasma processingJournal of Vacuum Science & Technology B: Microelectronics and Nanometer Structures, 1991
- Very efficient plasma generation by whistler waves near the lower hybrid frequencyPlasma Physics and Controlled Fusion, 1984