Hydrogen passivation of donors and acceptors in SiC

Abstract
The effect of hydrogen on donors (N) and acceptors (Al, B) in 6H-SiC crystals has been evidenced by electron spin resonance and transport measurements. Typical passivation (i.e., complexing with H) levels of 75% have been obtained by annealing in a H2 atmosphere, and a corresponding decrease in free-carrier density has been observed.