Microcrystalline and interface structure of metallic multilayers from x-ray spectra

Abstract

A calculation of the large-angle x-ray-scattering spectra is derived for crystalline multilayered films having extended interfaces with linear random alloy-composition variation. The model also includes the presence of crystallites of the pure components. By fitting the calculated and measured spectra the structural parameters such as the individual layer thicknesses, bilayer and interface thicknesses, and lattice spacings, as well as coherence length of the multilayer and crystallite sizes in the direction of growth of the multilayer, can be determined. In the fitting procedure these parameters are essentially independent and can be determined to within fractions of an angstrom. A comparison of the calculated and measured spectra for several Co/Cr multilayers is made and briefly discussed.