Measuring Methods of Plasma Parameters by a Differentiating and Modulating Double Probe
- 1 April 1988
- journal article
- Published by IOP Publishing in Japanese Journal of Applied Physics
- Vol. 27 (4R)
- https://doi.org/10.1143/jjap.27.694
Abstract
Methods for the (1) determination of the electron temperature by differentiation of the probe curve, (2) detection of a non-Maxwellian energy distribution and plasma inhomogeneity, (3) rapid measurement of the electron temperature by voltage modulation, and (4) measurement of the space potential are developed.Keywords
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