Preparation and Properties of (Pb, La)TiO3 Pyroelectric Thin Films by RF-Magnetron Sputtering
- 1 September 1993
- journal article
- Published by IOP Publishing in Japanese Journal of Applied Physics
- Vol. 32 (9S), 4065-4068
- https://doi.org/10.1143/jjap.32.4065
Abstract
The c-axis-oriented Pb0.85La0.15Ti0.96O3 (PLT) thin films appropriate for the infrared sensor utilized in environmental monitoring were successfully obtained by rf-magnetron sputtering. The effects of sputtering conditions on the thin film growth were studied. Highly c-axis-oriented films were prepared under the most suitable sputtering conditions. Those films showed extremely large pyroelectric coefficient of 1.3×10-7 C/cm2 K and relatively small dielectric constant of 350 (1 kHz) at room temperature. Dielectric and ferroelectric properties of the film were also reported.Keywords
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