Suppression of molecular ions in SIMS spectra of metals and semiconductors
- 1 April 1985
- journal article
- research article
- Published by Wiley in Surface and Interface Analysis
- Vol. 7 (2), 69-73
- https://doi.org/10.1002/sia.740070203
Abstract
No abstract availableKeywords
This publication has 8 references indexed in Scilit:
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- High-sensitivity depth profiling of arsenic and phosphorus in silicon by means of SIMSApplied Physics Letters, 1976
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