AC-Thin Film ZnS:Mn Electroluminescent Device Prepared by Metal Organic Chemical Vapor Deposition

Abstract

AC-thin film ZnS:Mn electroluminescent devices are fabricated by the Metal Organic Chemical Vapor Deposition, using dimetylzinc and H₂S as source materials. The crystal structure of the MOCVD-prepared ZnS film on glass is (111)-oriented cubic polycrystalline. The electroluminescent center Mn is added into MOCVD-prepared ZnS film through thermal diffusion. The brightness and efficiency of the MOCVD-prepared EL devices are higher than those of the EB-evaporation prepared EL devices having the same structure. The MOCVD-prepared EL devices exhibit few dark spots, and therefore exhibit high stable operation and high breakdown voltage.