Composition–Depth profiling and interface analysis of surface coatings using ball cratering and the scanning auger microprobe
- 1 December 1979
- journal article
- research article
- Published by Wiley in Surface and Interface Analysis
- Vol. 1 (6), 204-210
- https://doi.org/10.1002/sia.740010607
Abstract
No abstract availableKeywords
This publication has 13 references indexed in Scilit:
- The structure and topographical modification of surfaces during depth profilingThin Solid Films, 1979
- The development of surface topography during depth profiling in auger electron spectroscopySurface Science, 1979
- Auger depth profiling of thick insulating films by angle lappingJournal of Vacuum Science and Technology, 1978
- Depth resolution and surface roughness effects in sputter profiling of NiCr multilayer sandwich samples using Auger electron spectroscopyThin Solid Films, 1977
- The behaviour of surfaces under ion bombardmentReports on Progress in Physics, 1975
- THE ASPECTS OF SPUTTERING IN SURFACE ANALYSIS METHODSPublished by Elsevier ,1975
- Applications of depth profiling by Auger/sputter techniquesJournal of Vacuum Science and Technology, 1975
- Techniques for elemental composition profiling in thin filmsC R C Critical Reviews in Solid State Sciences, 1973
- Auger Electron Spectroscopy Studies of Sputter Deposition and Sputter Removal of Mo from Various Metal SurfacesJournal of Applied Physics, 1972
- Use of Auger Electron Spectroscopy and Inert Gas Sputtering for Obtaining Chemical ProfilesJournal of Vacuum Science and Technology, 1972