Rankings
Publications
Search Publications
Cited-By Search
Sources
Publishers
Scholars
Scholars
Top Cited Scholars
Organizations
About
Login
Register
Home
Publications
Soft x-ray projection lithography using an x-ray reduction camera
Home
Publications
Soft x-ray projection lithography using an x-ray reduction camera
Soft x-ray projection lithography using an x-ray reduction camera
AH
Andrew M. Hawryluk
Andrew M. Hawryluk
LS
Lynn G. Seppala
Lynn G. Seppala
Publisher Website
Google Scholar
Add to library
Cite
Download
Share
Download
1 November 1988
journal article
Published by
American Vacuum Society
in
Journal of Vacuum Science & Technology B
Vol. 6
(6)
,
2162-2166
https://doi.org/10.1116/1.584107
Abstract
No abstract available
Cited by 89 articles