Interference effects on the surface of Nd:YAG-laser-reacted Pd-silicide
- 1 April 1980
- journal article
- research article
- Published by AIP Publishing in Applied Physics Letters
- Vol. 36 (7), 559-561
- https://doi.org/10.1063/1.91545
Abstract
The generation of silicides by laser irradiation of Pd‐coated Si wafers is often associated with circular ripple patterns formed in the irradiated area. These surface modulations are explained by inhomogeneous reaction of Pd with Si due to interference effects in the incident laser beam.Keywords
This publication has 6 references indexed in Scilit:
- A study of silicide formation by laser irradiationJournal of Applied Physics, 1979
- Periodic regrowth phenomena produced by laser annealing of ion-implanted siliconApplied Physics Letters, 1978
- CO2 laser-produced ripple patterns on NixP1−x surfacesApplied Physics Letters, 1977
- Surface scattering at LSD-wave initiation sites on nonmetallic materialsApplied Physics Letters, 1974
- Laser mirror damage in germanium at 10.6 μmApplied Physics Letters, 1973
- Semiconductor Surface Damage Produced by Ruby LasersJournal of Applied Physics, 1965