Friction and wear studies on lubricants and materials applicable to MEMS
- 9 December 2002
- proceedings article
- Published by Institute of Electrical and Electronics Engineers (IEEE)
- Vol. a21 a23, 143-147
- https://doi.org/10.1109/memsys.1991.114785
Abstract
No abstract availableThis publication has 4 references indexed in Scilit:
- Polysilicon microstructures to characterize static frictionPublished by Institute of Electrical and Electronics Engineers (IEEE) ,2002
- Tribology and Mechanics of Magnetic Storage DevicesJournal of Applied Mechanics, 1991
- In situ friction and wear measurements in integrated polysilicon mechanismsSensors and Actuators A: Physical, 1990
- Friction and wear in microfabricated harmonic side-drive motorsPublished by Institute of Electrical and Electronics Engineers (IEEE) ,1990