Optimised Multi-Scan H-Beam Annealing Of Mos Devices
- 1 January 1981
- journal article
- Published by Springer Nature in MRS Proceedings
Abstract
No abstract availableKeywords
This publication has 3 references indexed in Scilit:
- Warpage of Silicon WafersJournal of the Electrochemical Society, 1980
- Characterisation of multiple-scan electron beam annealing methodElectronics Letters, 1980
- The Effect of Hot Electron Injection on Interface Charge Density at the Silicon to Silicon Dioxide InterfaceJournal of the Electrochemical Society, 1980