MHz Opto-mechanical Modulator
- 25 August 2005
- conference paper
- Published by Institute of Electrical and Electronics Engineers (IEEE)
- Vol. 1, 289-292
- https://doi.org/10.1109/sensor.1995.717175
Abstract
In this paper a Fabry-Perot modulator fabricated by surface micromachining is presented. The modulator is optimized for a wavelength of 1.3 /spl mu/m and intended for fiber-in-the- loop applications. It consists of a double-supported polysilicon beam separated from an underlying polysilicon electrode by an air gap. The two polysilicon electrodes form the mirrors of the Fabry-Perot cavity. By electrostatic actuation the optical path between the mirrors can be reduced, which results in modulation of the reflectivity. Characterization of the modulator shows a maximum on-off ratio of 9 dB. The observed modulator behaviour indicates a maximum modulation rate of 2.8 Mbit/s.Keywords
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