Langmuir probe measurements in the negative glow of a sputtering DC discharge
- 21 February 1978
- journal article
- Published by IOP Publishing in Journal of Physics D: Applied Physics
- Vol. 11 (3), 293-300
- https://doi.org/10.1088/0022-3727/11/3/016
Abstract
Radial and axial profiles of the density ne and temperature Te of the slow electron group have been studied in the negative glow of an abnormal discharge in a DC diode sputtering system, by Langmuir probes. The variations of ne and Te have been also studied as a function of discharge current and discharge pressure. The contamination of the probes has been examined.Keywords
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