DC diode sputtering of titanium: determination of optimal deposition conditions by electrical and spectroscopic investigations
- 21 August 1976
- journal article
- Published by IOP Publishing in Journal of Physics D: Applied Physics
- Vol. 9 (12), 1783-1795
- https://doi.org/10.1088/0022-3727/9/12/017
Abstract
An argon DC glow discharge in a diode sputtering system fitted with a titanium cathode is investigated. The first results fix the boundaries of good working conditions for the discharge; mathematical relations are established for the pressure range 40-120 mTorr, anode-cathode lengths from 15 to 60 mm and current densities from 0.6 to 2 mA cm-2. The deposition rate is found to be proportional to the electrical power if the product pd is kept constant, but the ratio of the deposition rate to discharge power exhibits a maximum for d approximately=1.5 le. Spectroscopic studies of the discharge close to the substrate surface show that the intensity of some arc and spark lines of titanium is also proportional to the deposition rate. Emission spectroscopy shows that hydrogen is produced and quickly pumped during the presputtering stage; its evacuation is necessary to obtain good metallic films.Keywords
This publication has 17 references indexed in Scilit:
- Residual gas analysis studies during sputtering of reactive metalsJournal of Vacuum Science and Technology, 1974
- Glow Discharge Optical Spectroscopy for Monitoring Sputter Deposited Film ThicknessJournal of Vacuum Science and Technology, 1973
- Glow-discharge optical spectroscopy for the analysis of thin filmsJournal of Applied Physics, 1973
- Sputtering in a glow discharge for spectrochemical analysisAnalytical Chemistry, 1972
- The gettering action of evaporated films of titanium and erbiumJournal of Physics D: Applied Physics, 1972
- Aspects chimiques de la formation de films d'oxydes d'etain par pulverisation reactiveThin Solid Films, 1972
- Low-Energy Sputtering Yields by Resonance Absorption and Emission Spectroscopic MethodsJournal of Applied Physics, 1964
- Vergleich der Kathodenzerstäubung reiner und oxydbedeckter MagnesiumoberflächenThe European Physical Journal A, 1937
- Der Kathodenfall der Glimmentladung in Abhängigkeit von der Stromdichte bei Spannungen bis 3000 VoltThe European Physical Journal A, 1930
- On the relation between current, voltage, pressure, and the length of the dark space in different gasesProceedings of the Royal Society of London. Series A, Containing Papers of a Mathematical and Physical Character, 1912