Fabrication and ethanol sensing characteristics of ZnO nanowire gas sensors
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- 23 April 2004
- journal article
- Published by AIP Publishing in Applied Physics Letters
- Vol. 84 (18), 3654-3656
- https://doi.org/10.1063/1.1738932
Abstract
Based on the achievement of synthesis of ZnO nanowires in mass production, ZnO nanowires gas sensors were fabricated with microelectromechanical system technology and ethanol-sensing characteristics were investigated. The sensor exhibited high sensitivity and fast response to ethanol gas at a work temperature of 300 °C. Our results demonstrate the potential application of ZnO nanowires for fabricating highly sensitive gas sensors.Keywords
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