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Impurity atom distribution from a two-step diffusion process
Home
Publications
Impurity atom distribution from a two-step diffusion process
Impurity atom distribution from a two-step diffusion process
DK
D.P. Kennedy
D.P. Kennedy
PM
P.C. Murley
P.C. Murley
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1 May 1964
journal article
Published by
Institute of Electrical and Electronics Engineers (IEEE)
in
Proceedings of the IEEE
Vol. 52
(5)
,
620-621
https://doi.org/10.1109/PROC.1964.3018
Abstract
No abstract available
Keywords
DIFFUSION PROCESSES
SEMICONDUCTOR IMPURITIES
SEMICONDUCTOR MATERIALS
EQUATIONS
TEMPERATURE
CONDUCTING MATERIALS
BOUNDARY CONDITIONS
FABRICATION
GEOMETRY
CONDUCTORS
Cited by 13 articles