14N depth distribution measurements for ultrathin dielectric films on silicon (100)
- 1 February 1996
- journal article
- Published by Elsevier in Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms
- Vol. 108 (3), 347-353
- https://doi.org/10.1016/0168-583x(95)01059-9
Abstract
No abstract availableKeywords
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