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A review of surface spectroscopies for semiconductor characterization
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A review of surface spectroscopies for semiconductor characterization
A review of surface spectroscopies for semiconductor characterization
CH
C. R. Helms
C. R. Helms
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1 April 1982
journal article
review article
Published by
American Vacuum Society
in
Journal of Vacuum Science and Technology
Vol. 20
(4)
,
948-952
https://doi.org/10.1116/1.571650
Abstract
No abstract available
Keywords
SEMICONDUCTOR CHARACTERIZATION
SPECTROSCOPIES FOR SEMICONDUCTOR
REVIEW OF SURFACE SPECTROSCOPIES
Cited by 10 articles