New suspended gate FET technology for physical deposition of chemically sensitive layers
- 1 April 1990
- journal article
- Published by Elsevier in Sensors and Actuators A: Physical
- Vol. 23 (1-3), 1023-1026
- https://doi.org/10.1016/0924-4247(90)87082-t
Abstract
No abstract availableKeywords
This publication has 3 references indexed in Scilit:
- An integrated low-power thin-film CO gas sensor on siliconSensors and Actuators, 1988
- Suspended gate field effect transistors modified with polypyrrole as alcohol sensorAnalytical Chemistry, 1986
- Field-effect transistor sensitive to dipolar moleculesApplied Physics Letters, 1983