A path: from electroplating through lithographic masks in electronics to LIGA in MEMS
- 1 January 1997
- journal article
- review article
- Published by Elsevier in Electrochimica Acta
- Vol. 42 (20-22), 2985-3005
- https://doi.org/10.1016/s0013-4686(97)00146-1
Abstract
No abstract availableKeywords
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