Practical limitations to accuracy in a nulling automatic wavelength-scanning ellipsometer
- 30 June 1976
- journal article
- Published by Elsevier in Surface Science
- Vol. 56, 134-147
- https://doi.org/10.1016/0039-6028(76)90441-6
Abstract
No abstract availableKeywords
This publication has 4 references indexed in Scilit:
- Ellipsometric analyses for an absorbing surface film on an absorbing substrate with or without an intermediate surface layerSurface Science, 1976
- Precision Bounds to Ellipsometer SystemsApplied Optics, 1975
- Some aspects of polarizer performanceJournal of Physics E: Scientific Instruments, 1971
- A modified method for calibrating the analyser and the polarizer in an ellipsometerJournal of Physics D: Applied Physics, 1970