Oxygen adsorption on the GaAs(110) surface

Abstract
The adsorption of nonexcited molecular oxygen on cleaved GaAs(110) surfaces at room temperature has been studied using photoemission techniques. Detailed analysis of the oxygen-induced structure in the valence-band region revealed two different forms of adsorbed oxygen. Adsorption in the first form saturates at a very low coverage (∠0.01 monolayer) and is probably associated with defect sites. Adsorption in the second form occurs at normal surface sites and produces measurable chemical shifts in Ga-3d and As-3d core levels. The nature of the second form of oxygen has been further investigated with core level studies of surfaces oxidized at room temperature and subsequently heated to a high temperature. Annealing to moderately high temperature (∠370°C) causes transfer of oxygen from As–O bonds to form additional Ga–O bonds. Fast heating to high temperature (430°–450°C) leads to desorption of roughly half of the oxygen atoms and all of the chemically affected As atoms, while little change in the Ga-3d core level is observed. Several previously proposed oxidation models are compared based on the present data.