Automatic Optical Thickness Gauge for Thin Film Measurements
- 1 February 1962
- journal article
- research article
- Published by AIP Publishing in Review of Scientific Instruments
- Vol. 33 (2), 172-176
- https://doi.org/10.1063/1.1746529
Abstract
An automatic ellipsometer for measurement of the thickness of thin films in the monomolecular range is described. The instrument is capable of pushbutton operation by untrained personnel, and has been in use in an industrial laboratory for about two years.Keywords
This publication has 3 references indexed in Scilit:
- Some New Aspects of the Reflection of Electromagnetic Waves on a Rough SurfaceJournal of Applied Physics, 1957
- Optical Measurements of Surface Films. IReview of Scientific Instruments, 1948
- Films Built by Depositing Successive Monomolecular Layers on a Solid SurfaceJournal of the American Chemical Society, 1935