Superconductivity and resputtering effects in rf sputtered YBa2Cu3O7−x thin films
- 21 December 1987
- journal article
- research article
- Published by AIP Publishing in Applied Physics Letters
- Vol. 51 (25), 2146-2148
- https://doi.org/10.1063/1.98975
Abstract
Superconducting stoichiometric YBa2Cu3O7−x films have been grown by rf sputtering of a single bulk material target in an Ar+10% O2 sputtering atmosphere on a variety of substrates. Films on SrTiO3 substrates exhibited the best post‐annealing superconducting properties with the critical onset temperature of 90 K and zero resistance at 67 K. The maximum current density for these samples was 1×105 A/cm2 at 4.2 K. An extensive loss of film underneath the target was observed during the growth of these films which can be attributed to resputtering due to oxygen anion or energetic neutral particle bombardment of the substrate.Keywords
This publication has 13 references indexed in Scilit:
- Superconducting Y-Ba-Cu-O oxide films by sputteringApplied Physics Letters, 1987
- Structural phase transition in YBa2Cu3O7−δ: the role of dimensionality for high temperature superconductivitySolid State Communications, 1987
- Preparation of Y-Ba-Cu oxide superconductor thin films using pulsed laser evaporation from high T c bulk materialApplied Physics Letters, 1987
- SUPERCONDUCTING OXIDE THIN FILMS BY ION BEAM SPUTTERINGAdvanced Ceramic Materials, 1987
- High TcY-Ba-Cu-O Thin Films Prepared by DC Magnetron SputteringAdvanced Ceramic Materials, 1987
- Crystallography and microstructure of Y1Ba2Cu3O9−x, a perovskite-based superconducting oxideApplied Physics Letters, 1987
- Critical-current measurements in epitaxial films of compoundPhysical Review Letters, 1987
- High superconducting transition temperatures in sputter-deposited YBaCuO thin filmsNature, 1987
- Superconductivity at 93 K in a new mixed-phase Y-Ba-Cu-O compound system at ambient pressurePhysical Review Letters, 1987
- Sputtering of Surfaces by Positive Ion Beams of Low EnergyJournal of Applied Physics, 1958