Micromachined Resonant Sensors— an Overview

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1 August 1998

journal article
research article
Published by Wiley in Sensors Update

Vol. 4 (1), 3-51
https://doi.org/10.1002/1616-8984(199808)4:1<3::aid-seup3>3.0.co;2-t

Abstract

No abstract available

Cited by 34 articles