Duo-Plasmaline — a linearly extended homogeneous low pressure plasma source
- 31 August 1997
- journal article
- Published by Elsevier in Surface and Coatings Technology
- Vol. 93 (1), 112-118
- https://doi.org/10.1016/s0257-8972(97)00015-7
Abstract
No abstract availableThis publication has 4 references indexed in Scilit:
- On the axial structure of surface wave sustained dischargesPhysica Scripta, 1995
- Influence of plasma surface treatment on the adhesion of thin films on metalsSurface and Coatings Technology, 1993
- Self-consistent modeling of surface wave produced discharges at low pressuresJournal of Applied Physics, 1991
- Elongated microwave electron cyclotron resonance heating plasma sourceJournal of Vacuum Science & Technology A, 1990