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Low Temperature CVD of Crystalline Titanium Dioxide Films Using Tetranitratotitanium(IV
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Low Temperature CVD of Crystalline Titanium Dioxide Films Using Tetranitratotitanium(IV
Low Temperature CVD of Crystalline Titanium Dioxide Films Using Tetranitratotitanium(IV
DG
David C. Gilmer
David C. Gilmer
DC
Daniel G. Colombo
Daniel G. Colombo
CT
Charles J. Taylor
Charles J. Taylor
JR
Jeff Roberts
Jeff Roberts
GH
Greg Haugstad
Greg Haugstad
SC
Stephen A. Campbell
Stephen A. Campbell
HK
Hyeon-Seag Kim
Hyeon-Seag Kim
GW
Glen D. Wilk
Glen D. Wilk
MG
Michael A. Gribelyuk
Michael A. Gribelyuk
WG
Wayne L. Gladfelter
Wayne L. Gladfelter
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1 January 1998
journal article
Published by
Wiley
in
Chemical Vapor Deposition
Vol. 4
(1)
,
9-11
https://doi.org/10.1002/(sici)1521-3862(199801)04:01<9::aid-cvde9>3.3.co;2-v
Abstract
No abstract available
Keywords
TEMPERATURE CVD
USING TETRANITRATOTITANIUM
DIOXIDE FILMS
LOW TEMPERATURE
CRYSTALLINE
Cited by 53 articles