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Effect of RTA on Thin Thermal Oxide
Home
Publications
Effect of RTA on Thin Thermal Oxide
Effect of RTA on Thin Thermal Oxide
RC
Richard G. Cosway
Richard G. Cosway
MH
Michael W. Hodel
Michael W. Hodel
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1 February 1988
journal article
Published by
The Electrochemical Society
in
Journal of the Electrochemical Society
Vol. 135
(2)
,
533-534
https://doi.org/10.1149/1.2095650
Abstract
No abstract available
Cited by 11 articles