Determination of the depth resolution in Auger depth profiling measurements
- 1 March 1979
- journal article
- Published by Elsevier in Thin Solid Films
- Vol. 57 (2), 209-212
- https://doi.org/10.1016/0040-6090(79)90150-0
Abstract
No abstract availableKeywords
This publication has 5 references indexed in Scilit:
- Depth resolution and surface roughness effects in sputter profiling of NiCr multilayer sandwich samples using Auger electron spectroscopyThin Solid Films, 1977
- Influence of ion bombardment on depth resolution in Auger electron spectroscopy analysis of thin gold films on nickelThin Solid Films, 1976
- Deconvolution method for composition profiling by Auger sputtering techniqueSurface Science, 1976
- Evaluation of concentration-depth profiles by sputtering in SIMS and AESApplied Physics A, 1976
- Techniques for elemental composition profiling in thin filmsC R C Critical Reviews in Solid State Sciences, 1973