Depth profiling of implanted 13C in diamond as a function of implantation temperature
- 1 September 1990
- journal article
- Published by Elsevier in Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms
- Vol. 51 (3), 247-252
- https://doi.org/10.1016/0168-583x(90)90496-h
Abstract
No abstract availableKeywords
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